FREESECS is an open-source project for SEMI SECS standards. The software is compiled with GNU autotools/GCC and runs on Linux, MacOS X, NetBSD. See http://opensecs.sourceforge.net
- SEMI E37.1
- SEMI E5
I was looking for something like this a few years ago. I may still be interested in it!
Nice to meet you all, I am very interested in developing SECS/GEM driver.