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FREESECS is an open-source project for SEMI SECS standards. The software is compiled with GNU autotools/GCC and runs on Linux, MacOS X, NetBSD. See http://opensecs.sourceforge.net
Features
- SEMI E37.1
- SEMI E5
License
GNU Library or Lesser General Public License version 2.0 (LGPLv2)Follow freesecs
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User Reviews
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well
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I was looking for something like this a few years ago. I may still be interested in it!
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Nice to meet you all, I am very interested in developing SECS/GEM driver.