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[Help] Analysing SEM data (.tif file): How to set the scales?

2016-12-10
2016-12-11
  • tone_n_tune

    tone_n_tune - 2016-12-10

    I am trying to analyze an SEM .tif file obtained from HITACHI TM3000 Tabletop Scanning Electron Microscope, but having trouble setting the sale. Could anyone please help me understand how to set it?

    Thanks.

    The accompanied SEM parameter file is attached below -

    [SemImageFile]
    Version=02-01
    InstructName=TM3000
    SerialNumber=104598-07
    DataNumber=0046
    SampleName=
    Format=TIF
    ImageName=BCCZ-4.tif
    Directory=C:\Users\User\Favorites\Desktop\tone_n_tune\ SaveMode=2
    Date=16/08/2016
    Time=18:56:58
    DateCheck=No
    TimeCheck=No
    NumberCheck=No
    CommentCheck=No
    DigitalZoom=No
    Media=DriveC
    DataSize=1280x1100
    DPI=200.69
    PixelSize=506.25
    SignalName=BSE COMPO
    AcceleratingVoltage=15000 Volt
    DecelerationVoltage=
    Magnification=250
    WorkingDistance=6900 um
    EmissionCurrent=72500 nA
    FilamentCurrent=1750 mA
    ObservationCondition=Normal
    Brightness=2223
    Contrast=1411
    Rotation=0
    LensMode=
    PhotoSize=
    Vacuum=High
    MicronMarker=300000
    SubMagnification=
    SubSignalName=
    SpecimenBias=
    Condencer2=2767
    ScanSpeed=Slow3
    CalibrationScanSpeed=
    ColorMode=Grayscale
    ColorPalette=
    ScreenMode=
    Comment=[]
    KeyWord1=
    KeyWord2=
    Condition=Vacc=15.0kV Mag=x250 WD=6.90mm
    DataDisplayCombine=
    StageType=0
    StagePositionX=0
    StagePositionY=0
    StagePositionR=
    StagePositionZ=
    StagePositionT=

     

    Last edit: tone_n_tune 2016-12-11
  • David Nečas

    David Nečas - 2016-12-10

    Can you please attach both the txt header and the image file here (using Add attachments)?

    This looks like a data format that should be loaded automatically by Gwyddion with correct scale. But I cannot check what really happens just from the header pasted to the question.

     
  • tone_n_tune

    tone_n_tune - 2016-12-11

    Hi David, I have attached both the files, thanks for having a look.

    Edit: Files removed as they are part of a research project.

     

    Last edit: tone_n_tune 2016-12-11
  • David Nečas

    David Nečas - 2016-12-11

    The file loads fine for me. You probably just need to open the header in Gwyddion, not the TIFF image. This is generally the preferred way of opening data split to header and raw image data files.

    The reason is that Gwyddion can recognise the header files, the headers say how to find the associated data files, etc. Going back from the image data to the header is not so easy because Gwyddion opens files in 120+ different formats (a bunch of them TIFF-based) and it does not know that in this specific case it should look for an associated .txt file.

     
  • tone_n_tune

    tone_n_tune - 2016-12-11

    I drag & dropped the header file and it opened fine. But what would be the units for roughness parameters? There is no units shown. Also, how do i tell Gwyddion the depth of the wire?

     
  • David Nečas

    David Nečas - 2016-12-11

    An SEM image contains recorded brigthness in pixels, similar to a photograph, just using electrons. SEM does not directly measure topography (like AFM) and the reconstruction of the 3D shape from a SEM picture is as difficult as from a photograph. There is specialised SEM software that performs (or at least attempts) such reconstruction, either from mutliple images taken from different angles using epipolar geometry, or just from shading (more like a gimmick this one). From the metrological point of view the results are questionable at best but can be still of some value if no better method is available. In any case, Gwyddion does implement this reconstruction (we focus on AFM where topography is actually directly measured). The values you see are brightness values. This is what the SEM measured -- and this is also what the statistical quantities tool evaluates. Hence only lateral measurements in the image are meaningful. There is no topographical information.

     
  • tone_n_tune

    tone_n_tune - 2016-12-11

    That was a good explanation. Any suggestion on how to represent the roughness parameters in this case?

     

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