A PDF version can be downloaded here
A step by step guide to convert a .gds file into a HFSS structure
Download the package and follow the installation guide
In the layout file (.gds), use an unused layer to draw a dummy substrate that represents substrate layer and oxide layers
Open the template technology file ‘techfile.csv’ containing layer information (techfile.csv). Modify the file to match the technology used. Add the dummy substrate layer number and layer information for substrate and oxide.
Run ‘gds2hfss.exe’
Fill in the dialog boxes (‘sample.gds’ and ‘techfile.csv’ for an example provided)
Click ‘Generate HFSS File’ to run the conversion
HFSS will launch with the structure converted from the .gds file
Define ports by drawing rectangular sheets from the ground plane to the conductor
Assign Excitations to the ports: right click sheet name → Assign Excitation → Lumped Port
Define port reference
Insert Frequency Sweep: right click Setup (under Analysis) → Add Frequency Sweep. Define sweep parameters
Run simulation: right click Analysis → Analyze All
Export to Network parameter: right click Results → Solution Data → check ‘Display all Freqs.’ → Export Matrix Data