I need to model a thin film resistor at high frequencies. A typical thin film resistor has 1um thick metal (TaN), is 0.020" long by 0.010" wide on AlN 0.005" thick with DK = 8.6. I tried using the Microstip model, and increasing the resistivity of the metal, but that did not seem to give accurate results. I was simulating from 2.5 to 3 GHz.