The PROFILE [1] is a tool for inverse modeling of the semiconductor devices using 2D data and advanced optimization driver. All the files and its documentation is available at the official homepage of Profile:
http://profile.ewi.tudelft.nl/
REF:
[1] G.J.L. Ouwerling. Inverse modelling with the PROFILE optimization driver. NASECODE VI Software Forum, Dublin, July 1989.
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