Lithoguru is oriented to free and simple lithography simulation. It helps to develop user defined models. The final goal will include OPC and PSM automation.

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License

GNU General Public License version 2.0 (GPLv2)

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Additional Project Details

Operating Systems

Linux, Mac

Languages

English

Intended Audience

Science/Research

User Interface

X Window System (X11)

Programming Language

C++

Related Categories

C++ Electronic Design Automation (EDA) Software

Registered

2008-01-30